| 摘要 |
In an electrostatic capacitance type transducer which has a substrate, a movable electrode confrontingly placed to the substrate in a movable manner through a space, a fixed electrode arranged on a detecting face confronting the movable electrode of the substrate, and a signal receiving portion which is conductive with the fixed electrode and derived from the detecting face of the substrate, the fixed electrode and the signal receiving portion are made of metals which are different with each other in their compositions. That is, the fixed electrode is made of metal which has a high corrosion resistance and is not likely to outbreak a hillock, and the signal receiving portion is made of metal which is easy for bonding. Alternatively, both the fixed electrode and the signal receiving portion are made of titanium. Through this, since the outbreak of the hillock can be prevented, the displacement of the movable electrode can be stably and precisely detected for a long time, and the shortening of the life of the fixed electrode caused by corrosion can be prevented. As to the signal receiving portion, an excellent bonding property can be ensured.
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