Piezoelectric micropump

摘要

A piezoelectric micropump is disclosed for pumping fluid from a container to a delivery point in low volumes and at controlled flow rates. The pumping action is created by movement of two or three diaphragms. The movement of each diaphragm is caused by expansion and contraction of an attached piezoelectric actuator. Coordination of the movement of the diaphragms creates unidirectional flow of the fluid. The piezoelectric actuators are cantilevered between the pump body and the diaphragms to provide greater deflection of the diaphragms. The piezoelectric actuators preferably are piezoelectric bimorphs such that the diaphragms can function as both seals and pumps.