DETECTION OF DEVIATION OF ANGLE OF RESONATOR MIRROR FROM ANGLE OF RESONATOR MIRROR WITHIN LASER OSCILLATOR AN DETECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an angle deviation detecting device which automatically detects the deviation of the angle of a resonator mirror from the angle of a resonator mirror within a laser oscillator and the direction of the deviation. SOLUTION: An angle deviation detecting device is provided with a fluorescent screen 22 for receiving one part of the emitted light of an ultraviolet-ray laser oscillator 10, a CCD camera 23 for imaging a fluorescent part generated on the screen 22, an image input board 24 which performs an image processing on an image imaged by the camera 23 to extract the amount of the feature in the image and detects the deviation of the angle of a resonator mirror from the angle of a resonator mirror within the oscillator 10 and the direction of the deviation from the amount of features, and a computer 25.