| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce connection resistance of signal wiring in a cold cathode fluorescent display device using an MIM fine electron source element formed at an intersecting part of a scanning line with a signal line and to prevent its step disconnection. SOLUTION: In an electron source element that uses a tunnel diode having a structure catching a tunnel insulation film 6 with a lower electrode (scanning line) 2L and an upper electrode 4 for performing electron emission, a structure is so formed that the upper electrode 4 abutting on a low-resistance power feeding signal line 3 formed through the lower electrode 2L and an interlayer insulation film 5 abuts on the tunnel insulation film 6 via a tapered part C formed in the power feeding signal line 3. Thereby, the connection resistance of signal wiring for driving the electron source element is reduced to prevent its step disconnection, so that a large-sized cold cathode type fluorescent display device composed by arranging the electron source elements in an array-like form can be realized.</p> |
