| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a fluorescent X-ray measuring device for reliably obtaining fluorescent X-ray information from the small region of a sample with high resolution and without any leakage. SOLUTION: A device is provided with an X-ray source F for generating X rays that are applied to a sample S, a capillary optical element 6 that is arranged at a position for taking in fluorescent X rays being generated from the sample S, a spectral crystal 3 that is arranged at a position where X rays being emitted from the capillary optical element 6 enter, and an X-ray detector 4 for detecting X rays being dispersed by the spectral crystal 3. The capillary optical element 6 is formed by bundling a plurality of capillary tubes 10, and its X-ray incidence port 6a is formed to be smaller than an X-ray emission port 6b so that it anticipates the small region of the sample S.</p> |
