CAP FOR PREVENTING SHORT CIRCUIT, ELECTRODE SUPPORT BAR AND PLASMA REACTOR

摘要

PROBLEM TO BE SOLVED: To form an electrical conductor film excellent in film quality on a substrate by preventing a short circuit between an electrical conductor and a core wire of a RF cable. SOLUTION: This cap 25 for preventing a short circuit is used within a plasma reactor for the purpose of connecting an electrode and a high-frequency cable 21 having a core wire 22 and a conductor 23 formed around the core wire 22 through an insulator. A through hole 26 for the core wire 22 is axially formed in a cap body 25a fitted on the tip of the high-frequency cable 21, while an annular slit 27 is formed on a peripheral face of the cap body 25a.