| 摘要 |
PROBLEM TO BE SOLVED: To provide a subject apparatus capable of being miniaturized and capable of easily performing the contrast of a chemical image and an optical image by making it possible of simply obtaining the optical image superposed on the chemical image. SOLUTION: In an optical scanning two-dimensional concn. distribution measuring apparatus having a sensor surface 8 on one surface of a semiconductor substrate 6 and constituted so as to two-dimensionally irradiating the semiconductor substrate 6 with modulated laser beam 3 from the other surface thereof, in such a state that the sensor surface 8 is irradiated with vertical illumination beam 28 having uniform optical intensity, the semiconductor substrate 6 is two-dimensionally irradiated with modulated laser beam 3 from the other surface thereof. |
