| 摘要 |
PROBLEM TO BE SOLVED: To provide a light intensity measuring element capable of accurately and rapidly measuring the intensity of light incident on a far ultraviolet range, an image pickup element, a spatial image measuring device, and an exposure device. SOLUTION: An electrically conducting material 31 is interposed between a pair of electrodes 29, 30 to constitute this light intensity measuring element 25. The plurality of light intensity measuring elements 25 are aligned continuously so as to constitute an image pickup element 24. The electrically conducting material 31 is formed as a thin film or paint film, etc., of indium-tin oxides(ITO), antimony-tin oxides(ATO) or the like, which is dissipated from between the electrodes 29, 30 by receiving exposure light. The intensity of the exposure light is detected on the basis of the electrical resistance characteristic of the electrically conducting material 31 thus varied, so as to measure an incident spatial image. |
