MEASURING METHOD AND EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To reflect the calculation results of voltage drops due to contact resistance on the regulation of voltage or current by storing the contact resistance obtained for each probe in a resistance memory section and correcting a test signal based on the contact resistance at a test signal generating section. SOLUTION: A measured contact resistance is transferred to a resistance memory section 103 in a tester 112 and stored therein. The contact resistance is delivered from the resistance memory section 103 to a correction value calculating section 313 where a voltage drop from a tester pin to a device is calculated by multiplying the value of a current flowing from a driver 304 by the contact resistance and the calculated voltage drop is added to a correction value. Since an offset is stored in a correction memory section 314 while taking account of the voltage drop due to contact resistance, voltage can be regulated while taking account of the voltage drop attributed to a device interface board 120 and a probe card 109 disposed between the tester pin and the device by storing.