| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to improve unevenness in thickness of deposited film in an inner wall of an inner tube, and reduce the frequency of maintenance. SOLUTION: A quartz boat 1 for mounting a substrate, on which a film is formed during a film forming step, a quartz table for mounting the boat 1, and an inner tube 3 provided around the boat 1 and the table 2, are rotated. Then, stress developed by uneven film formation on an inner wall of an inner tube 3 can be prevented.
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