| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device for forming an electrode conductor with low resistance and high Q-inductor suitably available in high frequency. SOLUTION: In this invention, an electrode wiring member 12 is formed on an upper face of a semiconductor substrate 11. The upper face of the electrode wiring member 12 is coated with photo-sensitive resin 21 and an exposure and development step is carried out to open the photo-sensitive resin, and after curing, the electrode wiring member 12 is etched with a mask of the photo-sensitive resin 21.
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