Ion source for elemental analysis of solid samples comprises a chamber having an inlet channel, a suction-extraction channel, a cathode, a cylindrical hollow anode and an aperture allowing ions to enter a mass spectrometer

摘要

An ion source for elemental analysis of solid material samples (5) by analysis of the plasma of a low-pressure discharge consists of a chamber having an inlet channel (8), a suction-extraction channel (9) for a working gas as well as a cathode (2) and a cylindrical hollow anode (1). A plasma (10) is generated over the material sample and ions generated pass through an aperture for analysis by a mass spectrometer. An additional channel (11) for the extraction of working gas by suction leads into the chamber to the side of aperture (4) for emission of the ions to be analyzed.