| 摘要 |
<p>An apparatus (50) for simultaneously depositing gradients components of two or more target materials onto a substrate (52) is disclosed. The apparatus comprises a first target material source (54) that directs a first target material towards the substrate (50) and a second target material source (56) that directs a second material towards the substrate. The apparatus further comprises a gradient shutter system (62) that blocks a first predetermined amount of the first target material and a second predetermined amount of the second target material directed towards the substrate in order to generate gradients of the first and second target materials on the substrate. The gradients of the first and second target materials being simultaneously deposited onto the substrate to form a homogenous resulting material. A method for simultaneously depositing gradients of two or more target material onto a substrate is also disclosed. Apparatus is especially useful for generating libraries for combinatorial materials research.</p> |
