| 摘要 |
PURPOSE: A process is provided to overcome inefficient use and reduction of chemical components of a CVD(chemical vapor deposition) process of copper by recollecting ligand reusing and re-synthesizing the CVD precursor of copper. CONSTITUTION: A by-product of a copper-ligand attachment is supplied to a process stream. The by-product of the copper-ligand attachment is cooled and condensed to separate Cu¬+2(1,1,1,5,5,5,- hexa fluoro - 2,4 - pentanedionate¬-1)2 from the process stream. Then, the by-product of the copper-ligand attachment contacts with a protonization operating agent selected from a group which is composed of sulphuric acid, hydrochloric acid, bromide hydracid, iodine hydracid, hydrogen sulfide, water, the mixture and so on. Then 1,1,1,5,5,5,- hexafluoro - 2,4 - pentanedione is re-collected.
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