| 摘要 |
<p>PROBLEM TO BE SOLVED: To guarantee the smooth movement of a work holding member without being hindered by a seal member by demarcating a treating space with the work holding member arranged within the opening of a top plate and a work conveying means and providing a pressing means for pressing the work holding member in the separating direction from the top plate. SOLUTION: A revolving arm 18 is arranged in a circular recess formed at the upper part of a vacuum tank in the sputtering vacuum device for forming a film on a work 36 such as a compact disk, and a top plate 25 is provided to cover the upper part of the vacuum tank. An opening 26 is formed in the top plate 25 as an inlet and outlet for the work, and the work 36 to be coated with a film is placed on a susceptor 21 by a rotary arm 37 provided with a chuck 38 at its top through the opening 26. The susceptor 21 is firmly held to the top plate 25 through an O ring 57, and the film is formed on the work 36. After the film is formed, the susceptor 21 is pressed by a presser pin 51, and the susceptor 21 is separated from the top plate 25.</p> |
