| 摘要 |
PCT No. PCT/EP97/01183 Sec. 371 Date Feb. 5, 1999 Sec. 102(e) Date Feb. 5, 1999 PCT Filed Mar. 8, 1997 PCT Pub. No. WO98/06943 PCT Pub. Date Feb. 19, 1998The invention relates to a cryopump having pump surfaces which are held at different temperatures during operation and are disposed in a housing with a flange for connecting the housing to a vacuum chamber. Additional pump surfaces are provided for the accumulation of easily condensable gases and improve the suction performance of the cryopump. These additional pump surfaces are disposed in the vacuum chamber and are connected to a first stage of a two stage refrigeration head via a cold bridge.
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