| 摘要 |
A tester is designed to test a semiconductor memory device. First of all, the tester executes the function test of a memory cell array, which is among the function tests of the semiconductor device. Then, the tester performs redundancy analysis to replace an abnormal portion of the memory cell array with a spare row/column. The tester also executes the DC characteristic test of the semiconductor memory device and the function test of a peripheral circuit of the semiconductor memory device. The redundancy analysis is performed in parallel to both the DC characteristic test and the function test of the peripheral circuit.
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