| 摘要 |
PURPOSE: A carrier system traveling on the ceiling is provided to consider a measure at a low cost by sensing that a returning product is contacted to obstacles such as people or carelessly leaving articles. CONSTITUTION: On holding a wafer carrier(6) by a carrier system traveling on the ceiling, an obstacle sensor(22) detects presence of an obstacle(21) in a sensing range(20) with non-contact. In detection of the obstacle(12), the wafer carrier(6) is stopped before contacted with the detected one(12). The obstacle sensor(22) is mounted on a hoist bonding trolley(3) smaller than a semiconductor manufacturing equipment(7) in numbers to be decreased in numbers. Therefore, a measure for contact between the wafer carrier(6) and the obstacle(21) is considered at a low cost.
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