METHOD FOR FORMING ANTI-FUSE USING METAL OXIDE LAYER

摘要

PURPOSE: A method for forming an anti-fuse is to easily perform a fuse repair by applying a bias to a metal oxide film in repairing a device. CONSTITUTION: An anti-fuse forming method comprises the steps of: depositing an insulating layer(20) on a first metal layer(10); depositing and etching a photosensitive film on the resultant material; forming a contact hole to expose the first metal layer; forming a metal oxide film(40) by oxidizing the first metal layer under an oxygen gas atmosphere within a chamber; and depositing a second metal layer(50) in the contact hole by pumping and exhausting an oxygen gas within the chamber. The second metal layer is an aluminum or a copper. The metal oxide film is formed by reacting a copper with an oxygen at an interface between the first metal layer and the second metal layer.