| 摘要 |
PURPOSE: A device adaptable to an actuator such as a Lorentz actuator and a transducer such as a velocity transducer, a lithographic projection apparatus having the device, and a fabrication method of a semiconductor device are provided not to cause excessive heat dissipation. CONSTITUTION: A device used as an actuator includes a magnet yoke having upper and lower parts(10a,10b), and a carrier member(20) capable of movement in connection with the magnet yokes(10a,10b). The magnet yokes(10a,10b) has at least one permanent magnet(14), and the carrier member(20) is positioned within a magnetic field generated by the permanent magnet(14). The carrier member(20) has an auxiliary magnet(28) creating a relative bias force between the magnet yoke(10a,10b) and the carrier member(20). The auxiliary magnet(28) consists of a permanent magnet or ferromagnetic material, and the bias force is used for a magnetic bearing having a high compliance. The carrier member(20) further has two coil halves(26). An electrical current passing through the coil halves(26) may be used for another control of the actuator. Alternatively, the device may be used for a transducer by sensing an electromotive force of the coil halves(26).
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