| 摘要 |
<p>PROBLEM TO BE SOLVED: To handle a work arm without generating a dead space in the work region by carrying the robot arm grasping a conveyed object on a support pedestal, and supporting the support pedestal rotatably by a rotary slide mechanism and horizontally movably by a slide mechanism. SOLUTION: When a wafer carrier 19 is unloaded from a manufacturing device 5, an unmanned conveying device is stopped in front of a station 5a, and the wafer carrier 19 is grasped and shifted to a deck 10a by a hand section 16 at the tip of a robot arm 12 carried by a support pedestal 13 on a conveying device 14 self-propelled along a conveyance track 7. The unmanned conveying device is moved toward an automatic shelf 6 on the conveyance track 7, the relation between the automatic shelf 6 and an interference object is judged by a built-in computer, the support pedestal 13 is horizontally moved to the side X by a slide mechanism 20, and the robot arm 12 reaches the prescribed position of the automatic shelf 6 without colliding with the interference object.</p> |
