MICROMACHINED DEVICE AND METHOD OF FORMING THE MICROMACHINED DEVICE

摘要

An apparatus (10) that includes a substrate (12) having first and second surfaces and a micromachined device (14) integral with the first surface (18) of the substrate (12), and wherein the second surface (20) is an outer portion of the apparatus (10). The apparatus (10) also has a cover (16) connected to the substrate (12). A method of forming a micromachined device (14) includes providing a substrate (12), fabricating the micromachined device (14) on the substrate (12), and connecting a cover (16) to the substrate (12).