首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
Dry-etching method
摘要
申请公布号
EP0528655(B1)
申请公布日期
2000.07.19
申请号
EP19920307440
申请日期
1992.08.13
申请人
HITACHI, LTD.
发明人
KUMIHASHI, TAKAO;TSUJIMOTO, KAZUNORI;TACHI, SHINICHI
分类号
G03F7/36;C23F4/00;H01L21/302;H01L21/3065;H01L21/308;H01L21/311;H01L21/3213;(IPC1-7):H01L21/306;H01L21/321;H01J37/32
主分类号
G03F7/36
代理机构
代理人
主权项
地址
您可能感兴趣的专利
Method for transmission of data telegrams via a radio link
Portable telephone and program for sending and receiving encrypted electronic mail
HIP FRACTURE DEVICE WITH BARREL AND END CAP FOR LOAD CONTROL
METHOD AND APPARATUS FOR MULTIPLEXING AUDIO PROGRAM CHANNELS FROM BROADCAST STREAMS TO PROVIDE A PLAYLIST
Charge pump circuit
Pixel and organic light emitting display device using the same
AIR POLLUTION SENSOR SYSTEM
PROLONGED DISPLAY LIFETIME
INSTALLATION AND PROCESS FOR SOLDERING
Autocatalytic Polyols
Electric toothbrush
Method and system for user roaming and service roaming in a digital broadcasting system
Device for controlling the operation of an internal combustion engine
CUP SHEATH TO PREVENT SOFT TISSUE IMPINGEMENT
SYSTEM FOR MEASURING AN INERTIAL QUANTITY OF A BODY AND METHOD THEREON
EARLY INFLORESCENCE-PREFERRED REGULATORY ELEMENTS AND USES THEREOF
METHOD FOR THE CREATION OF PLANAR VARIATIONS IN SIZE OR DISTANCE IN NANOSTRUCTURE PATTERNS ON SURFACES
DEVICE PROVIDING AN INTERFACE BETWEEN A DENTAL IMPLANT AND AN ABUTMENT
Use of textile reinforcing fibres deriving from rubber waste recycling for the production of bituminous plates
METHODS AND COMPOSITIONS FOR MULTIPLEXING DETECTION OF NUCLEIC ACID SEQUENCES WITHIN AN ARRAY ELEMENT
