INTEGRATED BAKE AND CHILL PLATE,申请号EP19980948472-传众专利搜索

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发明名称	INTEGRATED BAKE AND CHILL PLATE
摘要
申请公布号	EP1019950(A1)	申请公布日期	2000.07.19
申请号	EP19980948472	申请日期	1998.09.22
申请人	APPLIED MATERIALS, INC.	发明人	BOLANDI, HOOMAN;TEPMAN, AVI
分类号	H01L21/027;H01L21/00;(IPC1-7):H01L21/00	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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