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发明名称
Apparatus for forming interconnects on a substrate and related method
摘要
申请公布号
GB0012754(D0)
申请公布日期
2000.07.19
申请号
GB20000012754
申请日期
2000.05.26
申请人
STS ATL CORPORATION
发明人
分类号
H01L21/48;H05K3/00;H05K3/40
主分类号
H01L21/48
代理机构
代理人
主权项
地址
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