发明名称 SEMICONDUCTOR DEVICE TESTER AND ITS CALIBRATION METHOD
摘要 PROBLEM TO BE SOLVED: To calibrate the output timing of test signal in a semiconductor test device, having a socket which has a first terminal capable of giving test signals to a semiconductor device and a driver outputting the test signal to the first terminal. SOLUTION: For this tester provided are a step installing a testing board having a terminal array similar to the terminal array of a semiconductor device 20 to a socket 50, a production step for producing test signals with a driver 76, a detection step for detecting the test signal having reached the testing board and a setting step for setting the output timing of the test signals, based on the test signals detected in the detection step. It is desirable that the contact terminal contacting the first terminal 12 in the testing board have the same input impedance as the contact terminal which makes contact with the first terminal 12 in the semiconductor device 20.
申请公布号 JP2000199781(A) 申请公布日期 2000.07.18
申请号 JP19990137847 申请日期 1999.05.18
申请人 ADVANTEST CORP 发明人 MATSUMURA SHIGERU;SEKIZUKA TAKASHI;NAGAI HIROYUKI;SHIOZUKA HIROYUKI;HAMA HIROYUKI;SEKINE HIDEKAZU;SUZUKI RIICHI;KOZUKA NORIYOSHI;ISHIGAKI YUKIO
分类号 G01R31/28;G01R31/02;G01R31/26;G01R31/319;G01R35/00;(IPC1-7):G01R31/28 主分类号 G01R31/28
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