发明名称 ULTRASONIC CLEANING MACHINE
摘要 PROBLEM TO BE SOLVED: To perform efficient ultrasonic cleaning by making an object to be cleaned be able to move appropriately along the surface of a vibrating plate without causing the increase in the size of an ultrasonic cleaning machine and the complexity of its structure and without causing difficulty in the supply of a cleaning liquid between the object and the vibrating plate. SOLUTION: In an ultrasonic cleaning machine in which at least one vibrating plate 2 vibrated by an ultrasonic vibrator 1 is disposed, and an object 3 to be cleaned is moved along the surface of the vibrating plate 2 while a cleaning liquid is supplied between the surface of the vibrating plate 2 and the object 3, a conveyer 4 in which a belt 40 which can hold the object 3 can move freely along the surface of the vibrating plate is disposed, and an open window part 43 is formed in the belt 40 so that the surface to be cleaned of the object 3 conveyed by the belt 40 faces the vibrating plate 2.
申请公布号 JP2000197860(A) 申请公布日期 2000.07.18
申请号 JP19990002893 申请日期 1999.01.08
申请人 ROHM CO LTD 发明人 ICHINOMIYA YORITO;BANDO MITSURU
分类号 B08B3/12;H01L21/304;(IPC1-7):B08B3/12 主分类号 B08B3/12
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