ULTRAPURE WATER ELECTROLYZING APPARATUS AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide an ultrapure water electrolyzing apparatus and method always stable in the oxidation and reduction potentials of an anode soln. and a cathode soln. and not almost generating particles. SOLUTION: An anode chamber 1 and a cathode chamber 2 are opposed to each other through a solid electrolyte 3 within an ultrapure water electrolyzing apparatus 16 and a DC current is supplied across an anode active substance 4 and the cathode active substance 5 applied to a carbon sheet 6 to form an anode soln. 10 and a cathode soln. 11 from ultrapure water 9. It is desirable to remove particles by fitting the filters to the outlets of the anode and cathode solns. 10, 11.