发明名称 ALIGNER, LENS-BARREL, CASING AND METHOD FOR TRANSPORTING THE SAME
摘要 PROBLEM TO BE SOLVED: To prevent the deviation of the holding position of a lens and the damage of the lens at the time of transportation, by installing a pressure adjusting mechanism for adjusting pressure within/without a closed space or within/without an almost closed space to almost equal pressure or almost constant differential pressure in a specified number or above closed or almost closed spaces in an aligner. SOLUTION: At the time of transporting a casing and a lens-barrel 14 where at least one or above spaces are filled/closed with inert gas by a transportation means whose pressure fluctuation is expected, air/inert gas collection parts are exchanged for elastic restoration materials 31 such as bellows and gas discharge ports 8 are opened. The elastic restoration materials 31 connected to the closed spaces of the lens-barrel 14, the casing and the aligner expand/ contract with a pressure change outside the closed space and pressures within/ without the closed spaces in the lens-barrel 14 and the casing become almost equal. Thus, the holding position of glass or optical elements 15 touching atmosphere outside an object is prevented from being deviated and it is prevented from being damaged.
申请公布号 JP2000200743(A) 申请公布日期 2000.07.18
申请号 JP19980377079 申请日期 1998.12.28
申请人 CANON INC 发明人 OSAKABE YUICHI
分类号 H01L21/027;G02B7/00;G03F7/20;(IPC1-7):H01L21/027 主分类号 H01L21/027
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