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发明名称
摘要
申请公布号
JP2000509208(A)
申请公布日期
2000.07.18
申请号
JP19970538670
申请日期
1997.04.28
申请人
发明人
分类号
H01L29/66;H01L29/82;(IPC1-7):H01L29/82
主分类号
H01L29/66
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