发明名称 METHOD FOR LOADING SEMICONDUCTOR DEVICE
摘要 PURPOSE: A method for loading a semiconductor device is provided to perform a loading operation of a semiconductor device smoothly by transferring a semiconductor device, which is transferred to a temporary buffer during a change time, to a loading buffer. CONSTITUTION: In a method for loading a semiconductor device, after initializing a handler, a microprocessor confirms whether a supply of a semiconductor device into a loading buffer is requested(S1). If not requested, the microprocessor is judged whether a temporary buffer is empty(S2). If the temporary buffer is empty, the semiconductor device is transferred into the temporary buffer which is located at a supply tray(S3). If a supply of a semiconductor device into a loading buffer is requested, the microprocessor confirms whether a semiconductor device exists at the supply tray(S4). If the semiconductor device does not exist at the supply tray, an exchange of the supply tray is requested(S6). If the supply tray is exchanged, the microprocessor confirms whether the exchanged supply tray is (n-1)th(S7). If the exchanged supply tray is not (n-1)th, the semiconductor device located at the temporary buffer is transferred to the loading buffer(S8). If the exchanged supply tray is (n-1)th, the semiconductor device located at the (n-1)th supply tray is filled at the temporary buffer(S9). Remaining semiconductor devices in the (n-1)th supply tray and semiconductor devices mounted at an n-th supply tray are transferred to the loading buffer(S10). The microprocessor confirms whether the n-th supply tray is empty(S11). If so, a mode, in which a semiconductor device is supplied from the loading buffer to the aligner, is changed(S12).
申请公布号 KR20000041739(A) 申请公布日期 2000.07.15
申请号 KR19980057704 申请日期 1998.12.23
申请人 MIRAE CORPORATION 发明人 SONG, JAE MYUNG
分类号 G01R31/26;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
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