DEVICE FOR ADJUSTING LIGHT PATH OF THIN FILM TYPE

摘要

PURPOSE: A device for adjusting a light path of a thin film type is provided to improve a driving characteristic of an actuator by protecting a modified layer from the exterior. CONSTITUTION: A device for adjusting a light path of a thin film type comprises an active matrix(100) which consists of a MOS transistor(120) and a first metal layer(135) having a drain pad extended from a drain of the transistor(120). A support line(174) and a plurality of anchors are formed on the support layer(170). An actuator(210) consists of a lower electrode(180), first and second modified layers(190) and first and second upper electrodes(200). The first and second modified layers(190) are formed on the lower electrode(180), and the first and second upper electrodes(200) are formed on the first and second modified layers(190), respectively. Protection layers(290) are formed from a top surface of the lower electrode(180) to each of the first and second modified layers(190). A mirror(260) is formed over a top surface of the actuator(210).