MANUFACTURING METHOD FOR THIN FILM MICROMIRROR ARRAY-ACTUATED DEVICE

摘要

PURPOSE: A manufacturing method of the TMA device is provided to improve image projected at a screen by allowing the projection light to reflect in a certain angle and to prevent the mirror from bending by thickening the surface of the second sacrificial layer. CONSTITUTION: A manufacturing method comprises the steps of: providing an active matrix including the first metal layer which has the drain pad extended from the drain of the transistor; patterning and forming the first sacrificial layer at the upper part of the active matrix; forming the actuator including the first and second upper electrode, first and second electrodisplacives and the lower electrode by patterning the lower part electrode layer, the second layer and the upper part electrode layer sequentially; forming a supporting instrument including the first and second anchors, a supporting layer and a supporting line; forming a second sacrificial layer by multi-coating the photo-resist at the upper part of the actuator and the supporting part; and carrying out the ultra violet curing at the second sacrificial layer.