METHOD FOR MANUFACTURING FERROELECTRIC CAPACITOR BY USING NIOBIUM-TANTALUM ALLOY ADHESIVE FILM

摘要

PURPOSE: A method for fabricating a ferroelectric capacitor is provided to improve an adhesive force between a lower electrode of the capacitor and a lower oxide layer and to prevent a metal from diffusing into a ferroelectric film by using a niobium-tantalum alloy adhesive film. CONSTITUTION: In order to improve an adhesive force between a lower electrode and a silicon oxidized substance, an Nb-Ta alloy(19) is used instead of Ti. An adhesive layer of the Nb-Ta alloy(19) is formed on an insulation layer(25) provided on a semiconductor substrate. On the adhesive layer, a lower electrode of a capacitor is provided. A ferroelectric film(19) containing Nb element and Ta element is then formed on the lower electrode. Finally, an upper electrode of the capacitor is formed on the ferroelectric film(19).