| 摘要 |
PURPOSE: An infrared bolometer is provided to have improved absorption area and absorbency. CONSTITUTION: An infrared bolometer comprises a substrate level, a support level, a pair of posts(270,272) and an absorption level. The absorption level comprises an absorber(295) and a bolometer element(285). The absorber(295) is made of such a silicon oxide material that a remaining tension is compensated and an insulation characteristic is excellent. The bolometer(285) is surrounded by the absorber(295). On the absorber(295) is formed a thin film layer consisting of a titanium, and an infrared absorber coating(299) is formed on the flat titanium thin film layer(297) so as to have a rough top surface.
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