发明名称 WAFER PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To improve an operation such as control and the like as well as to reduce the number of operating panels. SOLUTION: Discrete control sections C1 to C14 and a main controller 25 corresponding to a plurality of processing units are mutually connected via a network 20. One to three interface sections, INT1A, INT1B, INT2, INT3, INT4A, INT4B, INT5, INT6, INT7A, INT7B, INT8, INT9A, INT9B, INT11, INT12A, INT12B, INT13, INT14A, INT14B, and INT14C are connected to every individual control sections C1 to C14. An operating panel 50 can be removably connected to an arbitrary one of those interfacing sections to be able to operate an arbitrary processing unit.
申请公布号 JP2000195775(A) 申请公布日期 2000.07.14
申请号 JP19980370906 申请日期 1998.12.25
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 YAMAMOTO SATOSHI
分类号 H01J9/46;G02F1/13;G02F1/1333;H01L21/027;(IPC1-7):H01L21/027;G02F1/133 主分类号 H01J9/46
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