| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor for detecting an acceleration of an object, with a relatively simple constitution by utilizing a variation of a thermal equilibrium of a thermal resistance element. SOLUTION: A sensor element 1 is disposed on a plane P of a symmetrical shape (square in the present embodiment) at the inside of a package 2 in which a fluid is filled. A variation in a convection direction of the fluid generated by heat-generating a heater resistance Rh for a heat-generating is detected as a variation of a thermal equilibrium state of a temperature detection resistance Rtu, at an upper stream side and a temperature detection resistance Rtd at a downstream side. Thereby, of the acceleration received by the sensor element 1, the acceleration component in the direction perpendicular to the parallel providing direction of two temperature-measuring resistance elements, i.e., a direction perpendicular to the longitudinal direction of three resistances on the sensor element 1 is detected. |
