| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer carrier which can eliminate wasteful space by reducing a space occupied in the side (horizontal direction). SOLUTION: By synchronously rotating a first motor 2a and a second motor 3a with a controller 6, an elevating rod 2 is moved vertically, and a pivoting arm 3 is pivoted on a vertical plane. A shaft center 4b of the lower end portion of a joint 4 is made to advance and retreat along a horizontal line. A wafer W is carried by a clamping arm 5, thereby restraining the pivoting arm 3 or the like from protruding to the side. |
