发明名称 PHOTOSENSITIVE RESIN COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive resin composition capable of forming a pattern high in transparence and contrast. SOLUTION: The photosensitive resin composition is characterized by containing (1) a photosensitive agent having, in the structure, a methylene cross- linked system comprising 1,2-naphthoquinonediazide skeleton and >=2 phenolmethylsubstitution derivatives, (2) a polymer having hydroxyl groups and carboxyl groups or a combination of a polymer having hydroxyl groups and a polymer having carboxyl groups, (3) a cross-linking agent capable of cross-linking a hydroxyl groups with a carboxyl group, and (4) a solvent.
申请公布号 JP2000194130(A) 申请公布日期 2000.07.14
申请号 JP19980371083 申请日期 1998.12.25
申请人 CLARIANT (JAPAN) KK 发明人 KURISAKI MINORU;HARADA TAKAMASA;KUDO TAKANORI;TAKEDA TAKASHI;FUKUZAWA JUNICHI
分类号 H01L21/027;C08K5/41;C08L25/18;C08L33/04;C08L101/06;G03F7/004;G03F7/022;G03F7/023;G03F7/033;G03F7/038 主分类号 H01L21/027
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