| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent contamination from causing on the inner side of a pellicle frame even if long-time exposure is carried out with light of a short wavelength by providing the outer wall of the pellicle frame with a fixing means for holding the pellicle frame in tight contact on the surface of a matrix provided with a transfer pattern to a substrate. SOLUTION: An adhesive tape 13 is stuck to the outer wall of the pellicle frame 11 and the pellicle frame 11 is tightly adhered to the surface of a reticle 18 provided with the transfer pattern by this adhesive tape 13. The adhesive tape 13 for fixing the pellicle frame 11 to the reticle 18 is stuck to the outer wall of the pellicle frame 11 in the manner described above, by which the volatile component of the tacky adhesive material of the adhesive tape 13 is prevented from flowing into the inner side of the pellicle frame 11. Then, even if the long-time execute is carried out by the exposure light of the short wavelength, such as a KrF laser, the photochemical reaction of the acid remaining on the surface of the reticle 18 with the volatile component of the tacky adhesive material of the adhesive tape 13 does not occur and the contamination is not caused on the surface of the reticle 18 on the inner side of the pellicle frame 11.</p> |
