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发明名称
Vorrichtung zur Behandlung von Abfall in einer Poliervorrichtung
摘要
申请公布号
DE69421577(T2)
申请公布日期
2000.07.13
申请号
DE1994621577T
申请日期
1994.08.16
申请人
EBARA CORP., TOKIO/TOKYO
发明人
KIMURA, NORIO;AOKI, KATSUYUKI;KAWASHIMA, KIYOTAKA;ISHIKAWA, SEIJI
分类号
B01D53/14;B01D53/50;B01D53/58;B24B55/03;C02F1/52;(IPC1-7):C02F1/52;B01D53/34
主分类号
B01D53/14
代理机构
代理人
主权项
地址
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