发明名称 |
CARRIER, CARRYING METHOD AND CARRYING SYSTEM |
摘要 |
PROBLEM TO BE SOLVED: To provide a carrier capable of effective conveyance as a whole. SOLUTION: A plurality of subcarrying paths, 5 which intersect a main carrying path 1 for carrying objects to be treated are arranged. stockers 6 are arranged corresponding to crossing portions of the main carrying path 1 and the respective subcarrying paths 5. The stocker 6 delivers the object to be treated between the main carrying path 1 and the corresponding subcarrying path 5, and keeps the object temporarily. A plurality of treating devices 7 are installed, corresponding to each of the subcarrying paths 5. The treating device 7 receives and treats the object to be treated which is carried on the subcarrying path 5. The object then is returned to the corresponding subcarrying path. |
申请公布号 |
JP2000195919(A) |
申请公布日期 |
2000.07.14 |
申请号 |
JP19980371421 |
申请日期 |
1998.12.25 |
申请人 |
FUJITSU LTD |
发明人 |
WATANABE KAZUHIRO;WATASHIRO MINEO;KITANO MASARU;OTA YUICHIRO;ISHII HIDEO |
分类号 |
H01L21/677;H01L21/68;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/677 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|