发明名称 CARRIER, CARRYING METHOD AND CARRYING SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a carrier capable of effective conveyance as a whole. SOLUTION: A plurality of subcarrying paths, 5 which intersect a main carrying path 1 for carrying objects to be treated are arranged. stockers 6 are arranged corresponding to crossing portions of the main carrying path 1 and the respective subcarrying paths 5. The stocker 6 delivers the object to be treated between the main carrying path 1 and the corresponding subcarrying path 5, and keeps the object temporarily. A plurality of treating devices 7 are installed, corresponding to each of the subcarrying paths 5. The treating device 7 receives and treats the object to be treated which is carried on the subcarrying path 5. The object then is returned to the corresponding subcarrying path.
申请公布号 JP2000195919(A) 申请公布日期 2000.07.14
申请号 JP19980371421 申请日期 1998.12.25
申请人 FUJITSU LTD 发明人 WATANABE KAZUHIRO;WATASHIRO MINEO;KITANO MASARU;OTA YUICHIRO;ISHII HIDEO
分类号 H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/677
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