| 摘要 |
PROBLEM TO BE SOLVED: To provide a pH sensor in a chemical mechanical grinding device, measure the pH of the grinding liquid by the pH sensor in the grinding time, and control the feeding amount of the grinding liquid according to the measuring result of the pH value. SOLUTION: In a grinding liquid feeding device used to a chemical mechanical grinding device, a grinding liquid tank 1 is connected to grinding liquid stock solution tanks 13a, 13b... through several pipes 11a, 11b..., and pumps 12a, 12b..., and connected to a drain treatment device 17 through a pipe 9 and a pump 10, and the whole body of the grinding liquid feeding mechanism has a structure cut off from the outside air. Furthermore, a measuring means 5 of pH of the grinding liquid 2 is provided in the grinding liquid tank 1, and it is connected to a display 6 of pH, and a controller 7, at the outer part of the grinding liquid tank 1, so as to facilitate the control of higher reliability of grinding.
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