发明名称 THIN FILM TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: A thin film transistor and a method for fabricating the thin film transistor are provided to improve the quality of the thin film transistor by preventing a copper of a gate electrode from diffusing ITO an active layer. CONSTITUTION: A gate electrode(33) is formed on a semiconductor substrate(11). An anti-diffusing layer(35) is formed on the surface of the gate electrode(33). A gate insulation film(37), an active layer(39) and an ohmic contact layer(41) are sequentially formed on the anti-diffusing layer(35). Then, the active layer(39) and the ohmic layer(41) are patterned such that the gate insulation film(37) is exposed thereby removing remaining portion except for a portion corresponding to the gate electrode(33). Source/drain electrodes which are connected to the ohmic contact layer(41) is formed on the substrate(11).
申请公布号 KR20000040732(A) 申请公布日期 2000.07.05
申请号 KR19980056451 申请日期 1998.12.19
申请人 LG.PHILIPS LCD CO., LTD. 发明人 WOO, JAE IK
分类号 H01L29/786;(IPC1-7):H01L29/786 主分类号 H01L29/786
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