PROCESS FOR THE REMOVAL OF COPPER AND OTHER METALLIC IMPURITIES FROM SILICON,申请号EP19980925138-传众专利搜索

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发明名称	PROCESS FOR THE REMOVAL OF COPPER AND OTHER METALLIC IMPURITIES FROM SILICON
摘要
申请公布号	EP1016131(A1)	申请公布日期	2000.07.05
申请号	EP19980925138	申请日期	1998.05.27
申请人	MEMC ELECTRONIC MATERIALS, INC.	发明人	SHIVE, LARRY, W.;VITUS, CARISSIMA, M.
分类号	H01L21/304;H01L21/306;(IPC1-7):H01L21/306	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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