Method of producing a polycrystalline alumina ceramic which is resistant to a fluorine-comprising plasma

摘要

A polycrystalline alumina ceramic material which is resistant to a fluorine-comprising plasma is produced by forming a green body including alumina and a binder, and sintering the green body at a temperature ranging from about 1400 DEG C. to about 1700 DEG C. for a time from about 8 to about 12 hours. The area % of unsintered particles in the polycrystalline alumina ceramic material does not exceed 0.1 area %, resulting in reduced emission of particles from the material after exposure to plasma fluorine.