| 摘要 |
PROBLEM TO BE SOLVED: To surely direct regular reflected light to be incident on the area of a light-receiving face, even if an optical displacement gauge is inclined slightly with respect to a measured object. SOLUTION: This triangulation type optical displacement gauge has a projection means 2 for irradiating a measured object 6 which is disposed in a slant direction to the measured object 6 having a surface, such as a mirror surface, a glossy surface, a glass surface, or the like; a projection lens 3 for condensing irradiation light 101 irradiated obliquely on the measured object 6 from the projection means 2; and a light-receiving means 4 for receiving regular reflected light 102 generated by regular reflection of the irradiation light 101 on the measured object 6. The optical displacement gauge measures the displacement of the measured object 6 by a light-receiving face 5 of the light-receiving means 4. A cylindrical lens 8 for making the regular reflected light 102 incident on an area of the light-receiving face 5 of the light-receiving means 4 is disposed between the measured object 6 and the light-receiving means 4.
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