| 摘要 |
PROBLEM TO BE SOLVED: To make a light receiving element have a thin-film wavelength converting layer. SOLUTION: In the structure of a light receiving element 4, there are laminated successively from its bottom surface an n-type electrode 5 made of Au, an n-type high-concentration impurity layer 6, an Si substrate 7, a light receiving portion 8 of a p-type high-concentration impurity layer, a p-type electrode 11, an SiO2 film 9, and a wavelength converting layer 10 made of a fluorescent substance. Hereupon, the film of the wavelength converting layer 10 is formed by depositing on the SiO2 film 9 the fluorescent substance through the projection of an electron beam.
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