| 摘要 |
A flat motor device comprising a stationary part (60) formed with a moving surface (21a) thereon and a moving part (51) moving along the moving surface, wherein the moving part (51) is provided with a plurality of permanent magnets (54) disposed at specified intervals in a two dimensional direction so as to face the moving surface and a plurality of air pads (56) disposed between adjoining permanent magnets (54) and adapted to jet pressurized air toward the moving surface, whereby the moving part (51) can be supported while floating above the moving surface by the static pressure of the pressurized air jetted from the air pads (56) toward the moving surface (21a). Therefore, a small, lightweight moving part almost equivalent in area to a permanent magnets arranged region can be implemented to thereby improve a position controllability of the moving part. |
