发明名称 Semiconductor device and production method thereof
摘要 This Application is intended to provide a method for effectively protecting paper or film-form media against forgery. This can be achieved by, for example, embedding in a paper or film-form medium a thin semiconductor chip up to 0.5 mm square, equipped with an antenna, and characterized in that the side walls of the semiconductor chip are formed using oxide films, and in that multiple such semiconductor chips are separated by etching. Limiting the size of these semiconductor chips to 0.5 mm or less enables improvement against bending and concentrated loads, and separating the semiconductor chips by etching results in semiconductor chips free from cracking and breakage. Also, the oxide films constituting the side walls of the semiconductor chips prevents short-circuiting at edges during connection to the respective antennas. Thus, simplified processes can be adopted. <IMAGE>
申请公布号 AU1683800(A) 申请公布日期 2000.07.03
申请号 AU20000016838 申请日期 1999.12.10
申请人 HITACHI LTD. 发明人 MITSUO USAMI;KAZUTAKA TSUJI;TAKESHI SAITO;AKIRA SATO;KENJI SAMESHIMA;KAZUO TAKARAGI;CHIZUKO YASUNOBU
分类号 B42D15/00;D21H21/48;G06K7/00;G06K19/073;G06K19/077;H01L21/60;H01L21/68;H01L23/31;H01L23/498;H01L23/58;H01Q1/22 主分类号 B42D15/00
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